Systems Technology

Spare Parts

We have large stocks of many different spare parts for various systems such as LAM Research Rainbow™, TCP™, AutoEtch™ and Drytek 384T.

Since these stocks continuously change please contact us to directly enquire about the respective product at .

We are happy to provide you with updated stock lists.



  • O-Rings
  • Filters
  • Bearings
  • Quad-rings
  • Ceramic parts
  • Electrodes
  • Quartz parts
  • System assemblies



  • Harmonic Arm Drives
  • RF Matching Units
  • Power Supplies
  • RF Generators

Wartungs – Kits

Maintenance – Kits
(Rainbow™, TCP™, AutoEtch™)

Our many years of experience in the service of Rainbow and TCP systems render it possible for us to put together a great many maintenance kits for your systems, which are installed at the respective time points in order to reach optimum life spans in your production.

  • Quarterly PM Kits
  • Semi Anual PM Kits
  • Anual PM Kits

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eBay Shop

A selection of spare parts can be found in our eBay shop.

visit eBay shop