Mass Flow Technology
MICRO FLOW SWITCH FOR GAS / LIQUID
The Micro Flow Switches are designed to precisely detect increasing or decreasing of the flow rate of gases or liquids in critical processes. Typical applications include process analyzer sample conditioning systems, critical purge monitors, excess flow safety and oxygen and specialty gas systems. The linear, high resolution adjustment allows precise settings. The miniature compact construction is ideal for high density system packaging.
- FULLY FIELD ADJUSTABLE
- SET POINT ACCURACY ±1%
- RESPONSE TIME < 10 MSEC
- CONTAMINATION RESISTANT
- OPERATES IN ANY ORIENTATION
- SHOCK AND VIBRATION RESISTANT
FS6200 SERIES MICRO FLOW SWITCH (GAS)
- Range: 30 sccm … 20 slm
- Medium: Gas
- Connection: 1/8″ / 1/4″ NPT
- Material: 316L Stainless Steel
- Certified: CE, EExdII CT3, CSA Class 1
FS6700 SERIES MICRO FLOW SWITCH (LIQUID)
- Range: 0.5 … 800 ml/m
- Medium: Liquid
- Connection: 1/8″ / 1/4″ NPT
- Material: 316L Stainless Steel
- Certified: CE, EExdII CT3, CSA Class 1
FS6900 SERIES MICRO FLOW SWITCH HIGH TEMPERATURE (GAS)
- Range: 30 sccm … 20 slm
- Medium: Gas
- Temperature: -40 … +150 °C
- Connection: 1/8″ / 1/4″ NPT
- Material: 316L Stainless Steel
- Certified: CE, EExdII CT3, CSA Class 1
FS5100 SERIES MICRO FLOW SWITCH HIGH FLOW (GAS)
- Range: 1 … 700 slm
- Medium: Gas
- Connection: 1/4″ / 1/2″ NPT
- Material: 316L Stainless Steel
- Certified: CE
FS5700 SERIES MICRO FLOW SWITCH HIGH FLOW (LIQUID)
- Range: 0.1 … 18 l/m
- Medium: Liquid
- Connection: 1/4″ / 1/2″ NPT
- Material: 316L Stainless Steel
- Certified: CE
FS5900 SERIES MICRO FLOW SWITCH LOW DIFFERENTIAL PRESSURE (GAS)
- Range: 1 … 240 slm
- Medium: Gas
- Connection: 1/4″ NPT
- Material: 316L Stainless Steel
- Certified: CE
FS6800 SERIES MICRO FLOW SWITCH SEMICONDUCTOR (GAS)
- Range: 30 sccm … 20 slm
- Medium: Gas
- Connection: 1/4″ VCR®
- Material: 316L Stainless Steel, 16µinch Ra
- Certified: CE
FS5800 SERIES MICRO FLOW SWITCH SEMICONDUCTOR, HIGH FLOW (GAS)
- Range: 1 … 700 slm
- Medium: Gas
- Connection: 1/4″ / 1/2″ VCR®
- Material: 316L Stainless Steel, 16µinch Ra
- Certified: CE
FS2200 SERIES MICRO FLOW SWITCH SEMICONDUCTOR, HIGH FLOW (GAS)
- Range: 30 sccm … 20 slm
- Medium: Gas
- Connection: SP-76 Mount
- Material: 316L Stainless Steel
- Certified: CE, EExdII CT3, CSA Class 1