Mass Flow Technology
DLI Vaporizers
Overview
DLI Products
VAPORIZERS
KEMSTREAM has developed the Vapbox series, a wide assortment of high-performing and fast response time direct liquid injection (DLI) vaporizers and evaporators. Vapbox DLI vaporizers feature an innovative and proprietary injection-atomization technology called injection head and an optimized vaporization chamber design.
Vapbox machines generate pure vapors for every application that requires a reactive gas phase obtained from liquid and solid compounds and precursors. Vapbox DLI vaporizers can work from vacuum to atmospheric pressure. They can inject and vaporize either pure liquids or liquids and solids dissolved in a carrier organic solvent or in a mixture of organic solvents. All Vapbox DLI vaporizers use KEMSTREAM’s innovative and proprietary injection head and optimized heat transfers. It allows them to provide unmatched performances based on a very fine pulsed atomization of a pulsed liquid flow mixed with a carrier gas prior to injection inside the vaporizer. The pulsed injection of the carrier gas blasts the liquid into very small droplets inside the vaporization chamber. The carrier gas also serves as a heat transfer medium and transfers heat energy very rapidly from the hot walls of the vaporization chamber to the droplets thus promoting a contactless flash vaporization process. A chemically pure vapor is generated for the process without undesired decomposition while avoiding the delivery of particles and liquid droplets to the process. Since Vapbox direct liquid injection vaporizers can start and stop delivering vapors very quickly, they are almost „vapor-on-demand“ systems.
Vapbox vaporizers are particularly adapted to the vaporization of thermally sensitive and expensive compounds and precursors at low vapor pressure. They can vaporize from 0.1g/min up to 20g/min . Vapbox 1500 and Vapbox 4000 can vaporize more than 15g/min of TEOS (tetraethyl orthosilicate) or other organosilicon with similar molecular weight.
VAPBOX 300
Compact and low cost DLI vaporizer that can generate temperatures up to 220°C. It features one high performance and proprietary KEMSTREAM injection head.
- One injection head
- One heating zone, up to 220°C, 400 W (230 VAC or 115 VAC)
- 2 K type thermocouples: (1 for heating control, 1 for alarm purpose)
- Current needed: 1.85 A (230 VAC) ; 3.7 A (115 VAC)
VAPBOX 500
Compact DLI vaporizer that can generate temperatures up to 250°C. It features one high performance and proprietary KEMSTREAM injection head.
- One injection head
- One heating zone, up to 250°C, 1000 W (230 VAC or 115 VAC)
- 2 K type thermocouples: (1 for heating control, 1 for alarm purpose)
- Current needed: 1.9 A (230 VAC) ; 3.8 A (115 VAC)
VAPBOX 1500
High performance and versatile DLI vaporizer that can generate temperatures up to 300°C. It features two proprietary KEMSTREAM injection heads.
- One or two injection heads
- Three heating zones, up to 300°C, 1650 W (230 VAC or 115 VAC)
- 3 K type thermocouples: (1 per heating zone)
- Current needed: 7.2 A (230 VAC) ; 14.4 A (115 VAC)
VAPBOX 4000
High performance and highly versatile DLI vaporizer that can generate temperatures up to 250°C. It features four proprietary KEMSTREAM injection heads.
- One to four injection heads
- Six heating zones, up to 250°C, 2600 W (230 VAC or 115 VAC)
- 6 K type thermocouples: (1 per heating zone)
- Current needed: 11.3 A (230 VAC) ; 22.6 A (115 VAC)
ATOMIZERS
Atokit DLI atomizers generate an aerosol that can be delivered to any atmospheric pressure process. Furthermore, the aerosol can be vaporized under vacuum or atmospheric pressure for generating pure vapor for every application that requires a reactive gas phase obtained from liquid and solid compounds and precursors. These applications include CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes.
Atokit can inject and atomize either pure liquids or liquids and solids dissolved in an organic carrier solvent or in a mixture of organic solvents. If an Atokit is used to deliver an aerosol flow to a process, the processes addressed are spray CVD, Aerosol Assisted CVD (AACVD), spray pyrolysis and pyrosol processes. If an Atokit is installed by the customer on a vaporization chamber, processes addressed by Atokit DLI vaporizers are CVD and ALD processes.
All Atokit atomizers use KEMSTREAM innovative and proprietary injection head. It allows them to provide excellent performances based on a very fine pulsed atomization of a pulsed liquid flow mixed with a carrier gas prior to injection. The pulsed injection of the carrier gas blasts the liquid as an aerosol of very small droplets. If the aerosol is delivered in a vaporization chamber, the carrier gas also serves as a heat transfer medium and transfers heat energy very rapidly from the hot walls of the vaporization chamber to the droplets promoting a contactless flash vaporization process. A chemically pure vapor is generated for the process without undesired decomposition while avoiding the delivery of particles and liquid droplets to the process. Since Atokit direct liquid injection atomizers can start and stop delivering aerosols very quickly, when combined with a vaporization chamber, they are almost „vapor-on-demand“ systems.
ATOKIT CF100
Compact and low cost DLI atomizer that can generate temperatures up to 300°C. It features one high performance and proprietary KEMSTREAM injection head.
- One injection head
- CF100mm stainless steel flange
- One heating zone, up to 300°C, 300 W (230 VAC or 115 VAC)
- 1 K type thermocouple
- Current needed: 1.3 A (230 VAC) ; 2.6 A (115 VAC)
ATOKIT KF50
Compact and low cost DLI atomizer. It features one high performance and proprietary KEMSTREAM injection head.
- One injection head
- KF50mm stainless steel flange
VAPOR CABINETS
KEMSTREAM has developed a high-performance vapor delivery system: Vapcab. It is a fully automated, stand-alone vapor generator and vapor flow control system. It is a very flexible tool which is configurable. It is able of vaporizing a very wide range of chemicals and precursors, pure liquids or solid ones dissolved in an organic solvent, from small to high flows. Vapcab can thus address a very wide range of processes and applications.
Vapcab is fully automated and equipped with a PLC (programmable Logic Controller). Its PLC provides control of temperature/flows (liquid and carrier gas), position of the valves and alarm functions.
The architecture of the liquid panel of the Vapcab allows the use and safe handling of air sensitive and pyrophoric chemicals and precursors. In case of solid chemicals and precursors or low volatility liquids, the liquid panel features a solvent tank for rinsing the injection line(s). The liquid and gas panels of the Vapcab are made with high quality components compatible with Ultra High Purity (UHP) liquid handling.
Vapcab is the only turnkey system on the market featuring high-performing direct liquid injection vaporizers. It is the perfect solution when an integrated vapor flow control system is required. Thanks to its high-performance DLI vaporizer(s), Vapcab can deliver precise, reliable and stable vapor flow. It is particularly adapted to low vapor pressure of liquid, solid and thermally sensitive chemicals.
VAPCAB
Vapcab is a modular and highly flexible vapor generator and vapor flow control system. Vapor cabinet Vapcab can be interfaced on any CVD machine, close to the machine or remote.
- one or more patented Vapbox direct liquid injection vaporize:
2 Vapbox 500, 2 Vapbox 300, 1 Vapbox 1500 (with 2 injection heads) or 1 Vapbox 4000 (with 3 or 4 injection heads) - a carrier gas panel with up to 4 carrier gas lines
- up to 4 liquid flow control kits
- a liquid panel with up to 4 precursor tanks and 1 solvent tank
- a multizone temperature controller
- a PLC (programmable Logic Controller)
- an exhausted cabinet enclosing all the components
- integral hot process and bypass valves