Systems Technology


Since 1995 we carry out repairs and complete refurbishments of assemblies and parts of LAM©, MATTSON©, GaSonics© and Applied Materials© systems. Thanks to our ISO9001-2008 certified quality management system, we are able to always guarantee the highest quality of our repairs.

    Fill in our repair form and include it with your shipping documents. An exact error description simplifies our testing. After reviewing your repair request you will receive a cost estimate. If you agree with our offer, please send us a written order and you will get your part back as soon as possible – cleaned, repaired and checked.

    A list with a complete overview of all repairable parts can be found here.

    If you have any questions, do not find a repairable part in the list or want to take part in our ex-ante replacement program, please contact us at: