Systems Technology
Repairs
Since 1995 we carry out repairs and complete refurbishments of assemblies and parts of LAM©, MATTSON©, GaSonics© and Applied Materials© systems. Thanks to our ISO9001-2008 certified quality management system, we are able to always guarantee the highest quality of our repairs.
Fill in our repair form and include it with your shipping documents. An exact error description simplifies our testing. After reviewing your repair request you will receive a cost estimate. If you agree with our offer, please send us a written order and you will get your part back as soon as possible – cleaned, repaired and checked.
A list with a complete overview of all repairable parts can be found here.
If you have any questions, cannot find a part to be repaired in the list or would like a preliminary replacement, please contact us at: parts@esl-elektronik.de.
LAM® Mini Match
- New silver coating; new Potentiometers; new Bearings; new Motors; new Gears
- Test and refurbishment of PCB
- Test of HV capacitors (exchange if necessary)
- Alignment and calibration
- Test in TCP tool under real process conditions
Various LAM® PCB’s
- Test of all components
- Renewal of all defective parts
- Alignment and calibration
- Test in TCP tool under real process conditions
LAM® T-Matches
- New silver coating; new Potentiometers; new Bearings; new Motors; new Gears
- Test, refurbishment and reconditioning of all HV Caps (renewal if needed)
- Alignment and calibration
- Special adjustments to customer specifications possible
- Plasma testing in TCP tool under real process conditions
LAM® Endpoint Detectors
- Replacement of optical filters
- Test and refurbishment of all PCB components
- Test of optical sensor (exchange if necessary)
- Alignment and calibration
Various LAM® mechanical assemblies
- New bearings; new motors; new sensors; new seals
- Test and refurbishment of all parts
- Test and renewal of all pneumatic parts
- Alignment and calibration
- Test in TCP tool under real process conditions