Mass Flow Technology
Our DLI Vaporizers
Kemstream has developed Vapbox series, a wide range of high-performing and fast response time direct liquid injection (DLI) vaporizers and evaporators. Vapbox DLI vaporizers feature an innovative and proprietary injection-atomization technology called injection head and an optimized vaporization chamber design.
DLI-PRODUCTS
KEMSTREAM manufactures innovative and advanced Direct Liquid Injection (DLI – Direct Liquid Injection) vaporizers and atomizers for CVD, MOCVD, MOVPE, ALD, spray pyrolysis and all gas phase processes and precursors. They deliver pure, accurate, repeatable and stable vapors and aerosols flows.
DLI-APPLICATIONS
Generation of reactive vapors and aerosols for deposition of numerous inorganic materials, organic polymers and hybrid materials as thin films or nanoobjects such as carbon nanotubes by CVD (Chemical Vapor Deposition), Spray CVD, spray pyrolysis, ALD (Atomic Layer Deposition) and MLD (Molecular Layer Deposition).
DLI-TECHNOLOGY
Kemstream has developed a unique and patented injection-atomization technology used as a keystone tool for all its direct liquid injection vaporizers and atomizers.