Systems Technology
Spare Parts
We have large stocks of many different spare parts for various systems such as LAM Research Rainbow™, TCP™, AutoEtch™ and Drytek 384T.
Since these stocks continuously change please contact us to directly enquire about the respective product at parts@esl-elektronik.de.
We are happy to provide you with updated stock lists.
WEAR PARTS
- O-Rings
- Filters
- Bearings
- Quad-rings
- Ceramic parts
- Electrodes
- Quartz parts
SYSTEM ASSEMBLIES
- Harmonic Arm Drives
- RF Matching Units
- Power Supplies
- RF Generators
MAINTENANCE – KITS
(RAINBOW™, TCP™, AUTOETCH™)
Our many years of experience in the service of Rainbow and TCP systems render it possible for us to put together a great many maintenance kits for your systems, which are installed at the respective time points in order to reach optimum life spans in your production.
- Quarterly PM Kits
- Semi Anual PM Kits
- Anual PM Kits
eBay SHOP
A selection of spare parts can be found in our eBay shop.