RTP2800A RTP

ESL is proud to present the new RTP2800A Rapid Thermal processing tool.

Due to the small amount of available used machines on the open market, we decided to install the old and outdated RTP2800 in a new frame with many different valuable upgrades. All process-relevant parts are still based on the proven MATTSON® RTP2800, but everything else has been upgraded and improved. In this way, the new RTP2800A can be easily integrated into your toolset without the need for new qualifications.

The RTP2800A is suitable for processing 4-8 inch wafers with or without a graphite box, making it perfect for various applications with SiC or InP materials.

The new machine has a new cooling system for water and air cooling, a new, easily accessible frame, a new robot/aligner system, a new wiring harness, new lamps, new power supply units and control cards as well as a new gold-plated lamp cage.

Instead of buying a completely new machine, we can also offer to upgrade one of your old machines. The respective machine must be removed from your cleanroom and sent to us. The old machine is completely dismantled by us, all reusable parts are reworked and reassembled and tested in a new frame with all available or selected upgrades before the almost new machine is sent back to you and installed there by our technicians. Of course, we can also support you with dismantling and re-installation.

We are official partner of MATTSON Thermal Products and are also responsible for the ongoing support of obsoleted products. A support of spares and support is granted for many more years to come.

Should you have any questions or need more detailed information please contact us.