Mass Flow Technology

Overview

SevenStar

Mass Flow Controller / Meter
  1. CS-200 Series Standard & HiTemp, Digital Technology
  2. CS-300 Series Digital & Pressure Insensitive Technology
  3. D07 Series Analog & Cost Efficient
  4. D08 Series Power Supplies & Readout Boxes

Each single Device is tested in our clean rooms by an experienced ESL Technician for its quality …

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CS-200 SERIES

Digital Mass Flow Controllers and Meters
  • HIGH PURITY
  • FAST RESPONSE
  • HIGH ACCURACY
  • MULTIPLE INTERFACES
  • MULTIGAS & MULTIRANGE
  • EXCELLENT SENSOR STABILITY

CS200 digital mass flow controllers incorporate the latest thermal technology for high accuracy, fast response time and low zero drift. Multi Gas and Multi Range, Auto Zero, Alarm, soft start and delay functions are available. The CS200 MFC offers reliable performance and long-term application flexibility.

Sevenstar is specialized in developing and manufacturing Mass Flow Controller and related flow delivery products. With over 30 years of experience in the field and the usage in a wide variety of industries and R&D institutions, the company enjoys a high reputation in the market. Every specification of these series is totally in accordance with the SEMI standard. Compared with analog products, CS200 MFCs show advantages such as convenience, multi-functions, easy communication, good expansion and perfect compatibility. CS200 MFCs hold 11 patent rights and have the CE approval.

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CS-200A – ELASTOMERE SEALS

  • Range: 5 sccm … 50 slm
  • High Accuracy: ±1.0% SP
  • Fast Response: < 1000msec
  • Seals: Viton / Neoprene
  • Interfaces: 0…5 VDC, 4…20mA, RS485, DeviceNet, Profibus
  • Power Supply: ±15 VDC, +24 VDC
  • Temp. Range: 0…50°C
  • Surface Finish: 25µinch Ra
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CS-200C – METAL SEALS, ELECTRO POLISHED

…FOR CORROSIVE GASES
  • Range: 2 sccm … 30 slm
  • High Accuracy: ±1.0% SP
  • Fast Response: < 800msec
  • Seals: Metal
  • Interfaces: 0…5 VDC, 4…20mA, RS485, DeviceNet, Profibus
  • Power Supply: ±15 VDC, +24 VDC
  • Temp. Range: 0…50°C
  • Surface Finish: 10µinch Ra (Electro Polished)
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CS-200D – METAL SEALS

…FOR CORROSIVE GASES
  • Range: 2 sccm … 30 slm
  • High Accuracy: ±1.0% SP
  • Fast Response: < 800msec
  • Seals: Metal
  • Interfaces: 0…5 VDC, 4…20mA, RS485, DeviceNet, Profibus
  • Power Supply: ±15 VDC, +24 VDC
  • Temp. Range: 0…50°C
  • Surface Finish: 25µinch Ra
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CS-200H – HIGH TEMPERATURE

…FOR CORROSIVE GASES / VAPOURS
  • Range: 2 sccm … 30 slm
  • High Accuracy: ±1.0% SP
  • Fast Response: < 800msec
  • Seals: Metal
  • Interfaces: 0…5 VDC, 4…20mA, RS485, DeviceNet, Profibus
  • Power Supply: ±15 VDC, +24 VDC
  • Temp. Range: 0…120°C (Remote Electronics)
  • Surface Finish: 10µinch Ra (Electro Polished)
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CS-230A – HIGH FLOW

  • Range: 50 … 300 slm
  • High Accuracy: ±1.0% SP
  • Fast Response: < 2.0sec
  • Seals: Viton / Neoprene
  • Interfaces: 0…5 VDC, 4…20mA, RS485, DeviceNet, Profibus
  • Power Supply: ±15 VDC, +24 VDC
  • Temp. Range: 0…50°C
  • Surface Finish: 25µinch Ra
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CS-300 SERIES

Digital PI Mass Flow Controllers and Meters
  • FAST RESPONSE
  • HIGH ACCURACY
  • ULTRA HIGH PURITY
  • MULTIPLE INTERFACES
  • MULTIGAS & MULTIRANGE
  • SMALL FOOTPRINT (1.125”)
  • EXCELLENT SENSOR STABILITY
  • PRESSURE INSENSITIVE TECHNOLGY

CS300 digital mass flow controllers incorporate the latest thermal technology for high accuracy, fast response time and low zero drift. Multi Gas and Multi Range, Auto Zero, Alarm, soft start and delay functions are available. The CS300 MFC offers reliable performance and long-term application flexibility.

Sevenstar is specialized in developing and manufacturing Mass Flow Controller and related flow delivery products. With over 30 years of experience in the field and the usage in a wide variety of industries and R&D institutions, the company enjoys a high reputation in the market. Every specification of these series is totally in accordance with the SEMI standard. Compared with analog products, CS300 MFCs show advantages such as convenience, multi-functions, easy communication, good expansion and perfect compatibility. CS200 MFCs hold 11 patent rights and have the CE approval.

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CS-310C – METAL SEALS, 1.125”, EP

…FOR CORROSIVE GASES
  • Range: 1 sccm … 30 slm
  • High Accuracy: ±0.8% SP
  • Fast Response: < 500msec
  • Seals: Metal
  • Interfaces: 0…5 VDC, 4…20mA, RS485, DeviceNet, Profibus
  • Power Supply: ±15 VDC, +24 VDC
  • Temp. Range: 0…50°C
  • Surface Finish: 5µinch Ra (Electro Polished)
  • Pressure Insensitive
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D07 SERIES

Analog Mass Flow Controllers and Meters

The D07-Series MFC is an analog elastomer sealed mass flow controller designed to measure and control the flow of gases in a wide variety of applications. It is well suited for the manufacture of semiconductors, petrochemicals, pharmaceuticals, as well as in the vacuum deposition, metallurgy, analytical instrumentation and gas distribution industries. The D07-Series can be used as a replacement for most standard mass flow controllers and can drop directly into the same space without modifying existing gas lines.

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D07-19 – LOW FLOW

  • Range: 5 sccm … 30 slm
  • Accuracy: ±1% FS / ±2% FS
  • Response: 1…4sec
  • Seals: Viton
  • Interfaces: 0…5 VDC / 4…20mA
  • Power Supply: ±15 VDC / +24 VDC)
  • Temp. Range: 5…45°C
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D07-23 – MID FLOW

  • Range: 20 … 250 slm
  • Accuracy: ±2.0% FS
  • Response: 2 sec
  • Seals: Viton
  • Interfaces: 0…5 VDC / 4…20mA
  • Power Supply: ±15 VDC / +24 VDC)
  • Temp. Range: 5…45°C
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D07-60 – HIGH FLOW

  • Range: 300 … 2500 slm
  • Accuracy: ±2.0% FS
  • Response: 10 sec
  • Seals: Viton
  • Interfaces: 0…5 VDC / 4…20mA
  • Power Supply: ±15 VDC / +24 VDC)
  • Temp. Range: 5…45°C
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D08 SERIES

READOUT BOXES AND POWER SUPPLIES

The D08 Flow Readout Box provides a power supply for one mass flow controller or mass flow meter. The D08 features a power supply, a flow Setpoint and a flow display for mass flow controllers or mass flow meters and enables the user to set and display the flow for a single MFC or MFM. The D08 is offered in a compact digital- or analog-style readout box, desktop readout box and rack-type flow readout box or flow accumulator.

  • High Accuracy Power Supply
  • Up to 4 MFC/MFM per Box
  • 85 – 265 VAC 50/60 Hz
  • CE Certified
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